Abstract
The paper presents the study results of barium-neodymium ferroniobate films with a thickness of 180 and 980 nm obtained by RF cathode sputtering. Using X-ray diffraction and magnetic force microscopy, we found that the films are single-phase, epitaxial and do not contain magnetic impurities. Atomic force microscopy data show that the films grow according to the Volmer-Weber mechanism.
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