Abstract
High reflectivity multilayered soft X-ray mirrors were deposited using a triode sputtering system, equipped with facilities for accurately monitoring film thickness, giving very sharp interfaces and a high stack regularity. Absolute reflectivity measurements of W/C and Ni/C multilayers were carried out at λ = 44.79 Å and λ = 67.8 Å using a special soft X-ray spectrogoniometer which enables the manufacturing conditions to be rapidly optimized without relying on synchrotron radiation. Magnetic studies of Ni/C multilayer films give information on the structure of the interfaces.
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