Abstract
The presented work examined the composition of nitrogen plasma with weight average temperature 49 kК. Correlation between the treatment mode and the structural-phase composi-tion and hydrophobic properties of the titanium oxide coating was found. It was shown that regardless of the plasma treatment mode, all coatings had a high microhardness value of more than 25 GРa and a high resistivity of more than 3105 Om cm.
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