Abstract
Phase composition, defect substructure, and mechanical properties of the Ti-Si-N coating deposited on metal and ceramic-metal substrates by electroarc sputtering of the Ti-Si composite cathode in an ionized nitrogen atmosphere are investigated by the methods of modern materials science. It is established that coatings so formed with a thickness of ∼1–3 µm are superhard (Hv ∼ 50 GPa), and have the nanocrystalline structure (with crystalline sizes D = 7 nm) based on titanium nitride δ-TiN.
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