Abstract
High purity molybdenum was implanted by C ion in a metal vapour vacuum arc (MEVVA) implanter. The influence of implantation parameters was studied by varying ion fluence and ion current density. The samples were implanted by 45 keV C ion with fluences from 1×10 15 to 1×10 18 ions/cm 2, respectively. The as-implanted samples were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), and nanoindenter. Different morphologies were observed on the surfaces of the as-implanted samples due to irradiation damage, and clearly related to implantation parameters. XRD spectra confirm formation of β-Mo 2C with ion fluences equal to or larger than 1×10 16 ions/cm 2, and formation of α-Mo 2C with ion fluence of 1×10 18 ions/cm 2. The maximum nanohardness and maximum modulus of the as-implanted samples increased gradually with increasing ion fluence, and reached the corresponding maximum values with ion fluence of 1×10 18 ions/cm 2. The experimental results suggest that the structure and properties of the as-implanted Mo samples exhibited strong dependence on implantation parameters.
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