Structure and properties of diamond films deposited on porous silicon

Abstract

Thick porous silicon (PS) layers, made by anodic etching of crystalline Si wafers, have been coated with diamond films using the hot-filament chemical vapor deposition (CVD) technique. Ethanol diluted in hydrogen was used as the carbon source for diamond deposition. We observed that diamond nucleation occurs predominantly on the top of the PS spikes, creating individual islands of growth. Nucleation is apparently homogeneous over the PS surface and the islands grow independently until the complete coalescence of the diamond film. Although the diamond film is polycrystalline, it does not have the usual columnar structure of diamond deposited on c-Si. A good adherence between diamond and PS was observed in diamond–PS and diamond–PS–diamond structures. The problems of the intrinsic and thermal stresses have been addressed. Samples were characterized by atomic force microscopy (AFM), scanning electron microscopy (SEM), Auger electron spectroscopy (AES), Raman and photoluminescence spectroscopy.