Abstract

Al–Cr–N coatings were formed at various nitrogen pressures, substrate bias voltages and substrate temperatures using cathodic arc evaporation. The relationship between technological parameters and properties of the coatings was investigated. The phase and chemical composition of the coatings, roughness, hardness, adhesion and thermal stability were analyzed by X-ray diffraction (XRD), scanning electron microscope (SEM), Energy-dispersive X-ray spectroscopy (EDX), micro-indenter, Rockwell, scratch tester and thermomechanical methods. The corrosion resistance of selected coatings was also investigated. XRD analysis indicates that the coatings crystallize in a cubic structure and show preferential orientation (200) CrN. With the increase of nitrogen pressure, the preferential orientation changes to (111). EDX analysis shows that as nitrogen pressure increases, the Al/(Al + Cr) rate decreases. Microscopic observations indicate that the number of macroparticles reduces as nitrogen pressure increases. As a result, the surface roughness parameter Ra of the coatings decreases. The effects of deposition temperature, nitrogen pressure and substrate bias voltage on the mechanical and tribological properties of the coatings were investigated. It was found that the above parameters influence the mechanical properties in different ways. The hardness and adhesion of coatings formed at higher temperatures was lower. Coatings formed under a higher nitrogen pressure or substrate bias voltage were characterized by higher hardness and better wear resistance.

Highlights

  • Chromium nitride coatings have found wide industrial applications due to their good mechanical and tribological properties and corrosion resistance [1,2]

  • The coatings deposited with coatings deposited at at higher substrate temperature, characterize about lower thickness ranged from higher substrate temperature

  • The highest deposition rate was observed for coatings deposited at nitrogen pressure of three pascals independent of substrate temperature

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Summary

Introduction

Chromium nitride coatings have found wide industrial applications due to their good mechanical and tribological properties and corrosion resistance [1,2]. It was found that the hardness, oxidation resistance and tribological properties of AlCrN coatings improved with an increase of Al content, up to 70%–75%—as long as a face-centered cubic structure dominates [4,15]. This results in an increase in resistance to oxidation compared to the CrN, TiN and TiAlN coatings and hardness stability up to temperature of 800 ◦ C [2]. With the concentration of aluminum increase in the AlCrN coating AlN hexagonal phase (h-AlN) is formed

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