Structure and phase composition of deposited tantalum–carbon films

Abstract

Ion plasma sputtering and the subsequent codeposition of ultrafine tantalum and carbon particles were used to prepare coatings with 4.6–71.5 at % C. Structural studies of the coatings showed the existence of carbon solid solutions in β Ta at carbon contents to 4.6 at %, carbon solid solutions in α Ta at carbon contents of 4.6–10.3 at %, and direct synthesis of TaC at carbon contents of 44.7–71.5 at %. During heat treatments to 700°C, the substantial concentration widening of regions of the existence of Ta2C and TaC was found. The lattice parameters of hexagonal Ta2C and fcc TaC carbides were determined for composition ranges of the existence of phases during heating to 700°C. Upon heating above 600°C, the progressive transition of quasiamorphous Ta2C carbide into the crystalline Ta2C carbide was found to take place. The possibility of applying the direct synthesis of TaC carbide in engineering was noted.