Abstract
s: In this study, nitrogen-doped ZnO thin films with different nitrogen content were produced by a wet chemical process. The optical properties and the structure of these ZnO films were investigated by LT-PL spectrum, Raman spectrum, SEM and XRD. XRD result showed that the cubic ZnO phase appeared in the 10% nitrogen-doped ZnO films, which might be attributed to the stress in these ZnO film. Moreover, results of SEM measurement proved that the nitrogen atoms were introduced into the lattice of nanoZnO crystal. In addition, LT-PL spectra also confirmed that this new appeared phase was a cubic ZnO phase, due to the lack of the new PL mission peak. Key words: ZnO, wet chemical method, luminescence, XRD
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