Abstract
Structure and optical properties (at (lambda) equals 0.154 nm and (lambda) equals 3.16 nm) of W - Ti, W - TiN, W - Sc and Cr - Sc multilayer x-ray mirrors for the long wave part of 'water window' wavelength range were studied by methods of the x-ray diffractometry and cross-sectional electron microscopy. The reflectivities at (lambda) equals 0.154 nm are increased going from W - TiN, Cr - Sc, W - Ti to W - Sc multilayers. Cr - Sc mirrors have highest reflectivity and resolution at (lambda) equals 3.16 nm. Influence of the ambient atmosphere on optical properties of multilayer mirrors is shown.
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