Abstract
X-ray diffraction and electron microscopic studies on co-sputtered Zn 1―x Fe x O single crystalline films showed the solubility limit to be about x = 0.50 at 673 K. An increase of Fe greater than 0.50 resulted in the existence of Fe metal and (ZnFe)Fe 2 O 4 spinel solid solution in a matrix of (ZnFe)O wurtzite solid solution below a substrate temperature of 573 K. Above a substrate temperature of 673 K, a ZnFe 2 O 4 spinel phase rather than a Fe metal phase was seen. Annealing of as-sputtered films with a single phase of Zn 1―x Fe x O in air led to decomposition to the two-phase structure of Zn 1―x Fe x O wurtzite and ZnFe 2 O 4 spinel and the decrease of the solubility limit of Fe in ZnO to about x = 0.11 at 873 K.
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