Abstract
The graphite nanoparticles (GNPs) were prepared on the surface of monocrystalline Si by laser irradiation under different laser energy densities (3.3–8.33 kJ/cm2). The effects of laser energy density on structure and surface morphology were systematically investigated. The results show that the morphology of GNPs remained polycrystalline structure under laser irradiation with an energy density of 2.22 kJ/cm2. When the laser energy density was 2.78 kJ/cm2, the GNPs can induce the preset GNPs to transform into amorphous graphite nanofibers. The GNPs under the laser density of 3.33 kJ/cm2 showed a more amorphous structure. With the further increase of the laser energy density to 5.55 kJ/cm2, the main phase composition turned to SiC and Si.
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