Abstract
We report the structure and magnetic properties ofZn1−xMnxO thin films grown on Si(001) substrates by pulsed laser deposition. Structure and phaseevolution with Mn doping has been studied using x-ray diffraction, electron diffraction, andhigh-resolution electron microscopy. The undoped and 1% Mn-doped ZnO films arecompletely (001) oriented, and further Mn doping deteriorates the (001) orientation. ForMn concentrations below 3%, only the hexagonal ZnO phase exists in the filmswithout secondary phases. As the Mn concentration reaches 5%, secondary phaseMn2O3 was found aggregating at grain boundaries. All the Mn-doped films show ferromagneticproperties at room temperature, and the magnetic moment decreases as the Mnconcentration increases. Our results suggest that the ferromagnetism observed inZn1−xMnxO thin films is intrinsic rather than associated with secondary phases.
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