Abstract
We have used a combination of methods to probe the structure and kinetics of electron beam induced damage in a monolayer of PF3 on Ru(0001). This is a particularly rich system, in which molecularly adsorbed PF3 is reduced to PF2, PF and P by electron bombardment. The concentrations and kinetics of damage by 550 eV electrons are measured as a function of surface temperature (100 to 300K) and PF3 coverage using soft x-ray photoemission spectroscopy (SXPS) excited by synchrotron radiation. Structures of fragments and ion desorption kinetics are measured using electron stimulated desorption ion angular distribution (ESDIAD). Evidence is seen for quenching of DIET processes via intermolecular interactions at high coverages. Damage rates and product distributions vary with temperature, due to a competition between DIET and thermal kinetic processes.
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