Abstract
Thin films of PbTiO3 (PT) were grown on various miscut (001) SrTiO3 (ST) substrates at 600°C by rf planar magnetron sputtering. The films on ST (miscut angle≤0.9°) included grain boundaries, but on ST (miscut angle≥1.7°) the surfaces were extremely smooth and comprised a periodic striped pattern which reflected the initial surface structure of the substrates. It was found that the critical miscut angle of substrate where the growth mode changes from twodimensional nucleation to step-flow was between 0.9°and 1.7°. TEM and XRD analysis showed that the PT thin films on miscut ST (miscut angle>≥1.7°) showed continuous single c-domain single crystal structure with three-dimensional epitaxy. The analysis of the c-axis tilt of the PT thin films also revealed that the film growth was governed by the stepflow growth.
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