Abstract
ABSTRACTPreparation of ferroelectric lead zirconate titanate (PZT) thin film by electron beam evaporation of multicomponent oxides followed by a post-deposition synthesis of PZT films by step-annealing under O2 ambient is described. Incipient formation of Pb3O4-ZrO2-PbTiO3 solid solution by a 600°C annealing is required for crystallization of PZT phase. Two morphotropic phase boundary reactions between solid solution phase with TiO2 and PbTiO3 with ZrO2 are proposed for PZT growth. Polarization and capacitance-voltage hysteresis data are presented to establish ferroelectric behaviour.
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