Abstract
In this paper, Hf–Si–N films were deposited on AZ31 magnesium alloys by ion beam assisted deposition (IBAD) technology. The phase structure, chemical valence state and nano-mechanical property of the films were investigated by means of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and nano-indentation test, respectively. The corrosion resistance in physiological solution was studied by electrochemical system. The results show that the main phases of the films are HfN phase and Si3N4 phase. And the films have good corrosion resistance in physiological solution.
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