Abstract

La 1- x Sr x CoO 3-δ (LSCO) films have been deposited on LaAlO 3 (LAO), La 1- x Sr x Ga 1- y Mg y O 3-δ/LaAlO 3 (LSGM/LAO) and yittria-stabilized zirconia (YSZ) substrates by pulsed laser deposition (PLD) for application to thin film solid oxide fuel cell cathodes. The optimum conditions for deposition were determined for the different substrates in an ambient of 80–310 mTorr oxygen pressure and at a substrate temperature range of 450 to 750°C. The films structures were analyzed by XRD, RBS and SEM. Epitaxial LSCO films were grown with (110) preferred orientation on YSZ, and with (100) orientation on LAO and LSGM/LAO. The electrical resistivity of the epitaxial LSCO films ranged from 10 −2 to 10 −4 Ω cm, depending on the deposition temperature and substrate. The ionic conducting behavior of the LSCO film on YSZ was investigated by impedance measurement.

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