Abstract
We performed structure analysis of Si single crystal and CaMoO(4) inorganic crystal by energy-filtered precession electron diffraction (PED). Structure analysis was performed using conventional selected area electron diffraction, PED and energy-filtered PED (EF-PED). The EF-PED method proved to be advantageous in determining the crystal structures and accurate cell parameters of inorganic crystals due to resolution enhancement by sharpening the peak shapes and reducing inelastic scattering. Among the EF-PED methods, zero-loss PED was most useful for structure analysis by minimizing inelastic scattering intensities, while plasmon-loss PED could be used effectively to determine crystal symmetry by closely observing the conditions of forbidden reflections.
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