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Abstract
We have simulated collisions of 5 keV silicon atoms with a silicon substrate. At this energy the simulation provides an atomistic description of the evolution of the displacement cascade. We discuss the structural changes occurring as the cascade regions transform from crystalline to liquid to amorphous phases. We compare the structure of the amorphous material with that of rapidly quenched liquid silicon. We also discuss the time evolution of the stress, kinetic and potential energies, and atomic density. An assessment of defect production mechanisms is made.
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