Abstract
Carbonaceous films containing Pd nanocrystals can be applied as active layers in gas sensor applications. In this article we show results of studies of C-Pd films, obtained with two different methods: (1) physical and (2) physical + chemical deposition. First type of film prepared by physical vapor deposition (PVD) process was composed of fullerenes, amorphous carbon, and palladium nanograins. In the second method PVD film was modified in chemical vapor deposition (CVD) process forming a foam-like structure. Both types of films were studied by SEM, TEM, TGA, and electrical characterization (measurement of resistivity versus composition of gaseous hydrocarbons mixture).
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