Abstract

Changing atomic-scale structure in sputtered amorphous MoGe films in the composition range from 25 to 65% Mo has been studied using RDF, anomalous scattering, EXAFS and small-angle scattering techniques. In the Ge-rich end the amorphous material shows strong chemical ordering similar to the Ge-rich intermetallics while in the Mo-rich end the amorphous structure looks much like that of ‘typical’ glassy metals.

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