Abstract

We present the structural study of ultra thin Ag films using grazingincidence x-ray reflectivity and the modification of these filmswith the tip of an atomic force microscope. Ag thin films are deposited usingdc magnetron sputtering on a Si(001) substrate. Initially, the growth of thefilm is carpet like and above a certain thickness (~42 Å) the filmstructure changes to form mounds. This ultra thin film of Ag havingcarpet-like growth can be modified by the tip of an atomic force microscope,which occurs due to the porous nature of the film. A periodic pattern ofnanometre dimensions has been fabricated on this film using the atomic forcemicroscope tip.

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