Structural studies of ion implanted optical waveguides in LiNbO3

Abstract

Grazing incidence X-ray diffraction measurements have been performed to determine the structure of optical waveguides in lithium niobate produced by He+ implantation. In addition, supporting X-ray reflectivity, electron microscopy and electron diffraction studies have been undertaken. The results indicate that in the damaged layer caused by the He ions the lattice disruption is primarily one dimensional, along the c-axis, with the basal plane remaining relatively intact. In the waveguiding layer between the damage and the surface the granularity and mosaicity of the lattice are increased. Beyond the damaged layer the crystal is annealed by the implantation process.