Abstract
A novel deposition method for large crystal grains was proposed, called hydrogen chemical transport deposition (HCTD). The effects of H2 flow rate on the structural properties of pentacene films prepared by HCTD were investigated. The useful efficiency was about 80% and large grains (2.6 µm) with a high bulk-phase ratio were obtained by controlling H2 flow rate. It is considered that structural properties are related to the H2 effect on the growth surface.
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