Abstract

We have synthesized titanium dioxide (TiO2) nanocrystallites by pulsed laser ablation (PLA) in oxygen (O2) background gas for photocatalyst applications. Varying O2 background gas pressure $$ \left( {P_{{{\text{O}}_{ 2} }} } \right) $$ or substrate target distance (D TS), it was possible to change weight fraction of anatase phase in the anatase/rutile mixture from 0.2 to 1.0. Porosity of the deposited TiO2 films increased with increasing $$ \left( {P_{{{\text{O}}_{ 2} }} } \right) $$ and D TS. Relation between the process parameters and the formed crystal phases was explained from the point of cooling process in vapor-phase. Furthermore, rapid thermal annealing (RTA) was performed as post-annealing, suppressing sintering of the nanocrystallites. Photocatalytic activities of the TiO2 nanocrystallites depended on the RTA temperature and following crystallinity restoring as well as the crystal phase: anatase or rutile.

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