Structural Properties of PZT(80/20) Thick Films Fabricated by Screen Printing Method

Abstract

Pb(Zr<TEX>$_{0.8}$</TEX>Ti<TEX>$_{0.2}$</TEX>)O<TEX>$_{3}$</TEX> powders, prepared by the sol-gel method, were mixed with an organic vehicle and the PZT thick films were fabricated by the screen-printing techniques on Pt/Ah03 substrates. The structural properties were examined as a function of sintering temperature. The particle size distribution of the PZT powder derived from the sol-gel process is uniform with the mean particle size of about 2.6 m. As a result of the DTA, the formation of the polycrystalline perovskite phase was observed at around <TEX>$890^{circ}$</TEX>CC. In the X-ray diffraction analysis, all PZT thick films showed a perovskite polycrystalline structure without a pyrochlore phase. The perovskite crystallization temperature of PZT thick films was about <TEX>$890^{circ}$</TEX>C. The average thickness of the PZT thick films was approximately 80-90 m.