Abstract
XPS-analyses and IR-absorption in a-Si 1−xC x:H and a-Si 1−xN x:H versus alloy composition for a-SiC:H show a kink in chemical shifts of core levels which indicates an alternating S C network structure and a strong increase in H content. For a-SiN:H the results point towards a statistical distribution of Si and N and a noticeable decrease in hydrogen content.
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