Abstract
In this work, the parametric structural schematic diagrams of a multilayer electromagnetoelastic actuator and a multilayer piezoactuator for nanomechanics were determined in contrast to the electrical equivalent circuits of a piezotransmitter and piezoreceiver, the vibration piezomotor. The decision matrix equation of the equivalent quadripole of the multilayer electromagnetoelastic actuator was used. The structural-parametric model, the parametric structural schematic diagram, and the matrix transfer function of the multilayer electromagnetoelastic actuator for nanomechanics were obtained.
Highlights
A multilayer actuator provides an increase in the range of movement from a few nanometers to tens of micrometers in nanomechanical systems for nanotechnology and adaptive optics
The parametric structural schematic diagrams of a multilayer electromagnetoelastic actuator and a multilayer piezoactuator are determined in contrast to the electrical equivalent circuits of a piezotransmitter and piezoreceiver, the vibration piezomotor [1–12]
An investigation of the static and dynamic characteristics of the multilayer piezoactuator was necessary for the calculation of nanomechanical systems in the scanning tunneling microscope and the atomic force microscope used for nanotechnology [7–29]
Summary
A multilayer actuator provides an increase in the range of movement from a few nanometers to tens of micrometers in nanomechanical systems for nanotechnology and adaptive optics. The parametric structural schematic diagrams of a multilayer electromagnetoelastic actuator and a multilayer piezoactuator are determined in contrast to the electrical equivalent circuits of a piezotransmitter and piezoreceiver, the vibration piezomotor [1–12]. Using the decision matrix equation of the equivalent quadripole of the multilayer electromagnetoelastic actuator, with an allowance for the corresponding equation for electromagnetoelasticity and the boundary conditions on its working faces, we constructed the structural-parametric model of the multilayer electromagnetoelastic actuator [8,9,14,16]. 2. Parametric Structural Schematic Diagram of the Multilayer Electromagnetoelastic Actuator. Where Si , vmi , Ψm , sijΨ , and T j represent the relative displacement, the electromagnetoelasticity coefficient (piezomodule or magnetostrictive coefficient dmi ), the generalized control parameter Construct electrically in parallel and mechanically in Letthe us construct the structural-parametric model of.
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