Abstract
Thermal deformation of water-cooling mirror with straight flow channels is investigated using a coupled thermo-mechanical finite element model. A new optimized design method and a novel structure for the mirror are proposed to alleviate the influence of thermal deposition on the optical performance. A comparative analysis of the temperature rise and thermal deformation of the mirror surface before and after optimization is carried out. The numerical analysis results reveal that though the peak temperature is reduced by only about 1 K, the thermal distortion on the irradiated region decreases from over 80 nm to less than 40 nm after optimization. It is demonstrated that the thermal distortion of the mirror surface can be reduced through accelerating and suppressing the heat transfer ability at the central region and periphery region of mirror surface respectively.
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