Structural Optimization and Simulation on the Piezoelectric Pressure Transducer

Abstract

In order to realize the extreme high-temperature measuring the pressure, a combined Silicon carbide with PZT piezoelectric pressure transducer was presented on piezoelectric excited resonant detection technologies. Simulate its static displacement, vibration mode and resonant frequency with computer based on ANSYS software, make a series of optimization of its material and structure parameters, and analyze the range and the sensitivity of transducer. The result of simulation shows it's a series of advantage of wide range, excellent linearity and high sensitivity, and analyzes structural parameter of the film of SiC and PZT affected on the range and natural frequency. This work provides the important reference for the design and manufacture of the new high temperature and wide range micro-transducer.