Abstract
The biosensor based on surface acoustic wave is of great significance for the application of biological clinical detection, but the sensitivity and specificity of surface acoustic wave biosensor still need to be improved. In this article, the structure of surface acoustic wave biosensor and interdigital transducer is designed by studying the theoretical model of surface acoustic wave biosensor. Then the amplitude–frequency response of the device is studied. Later, the simulation model of surface acoustic wave biosensor structure is established, and the performance of surface acoustic wave device is numerically calculated. Meanwhile, the relationship between the applied excitation signal and the resonant frequency is considered, and the performance of the surface wave propagation and attenuation characteristics are analyzed. In addition, the influence of the material of the piezoelectric substrate and the structure of the interdigitated electrode on the surface acoustic wave propagation are studied. The response potential curve and the total displacement of the particle vibration are analyzed, and the structure of the surface acoustic wave device is optimized.
Highlights
With the rapid development of modern sensor technology,[1,2,3] surface acoustic wave (SAW) biosensor has attracted great attention in the field of biomedicine because of its easy integration, miniaturization, high accuracy as well as sensitivity to trace information.[4]
The model studied in this article uses YZ-cut piezoelectric material substrate,[30] and at the same time, lithium niobate (LiNbO3) is used as the substrate material to carry out the modeling and simulation and analyze the propagation characteristics of SAW
The numerical method was adopted to analyze the relationship between the amplitude– frequency response of the SAW device under ideal conditions and the actual situation, and the guiding suggestions for the optimal design of the sensor were put forward
Summary
With the rapid development of modern sensor technology,[1,2,3] surface acoustic wave (SAW) biosensor has attracted great attention in the field of biomedicine because of its easy integration, miniaturization, high accuracy as well as sensitivity to trace information.[4]. Based on structural design and material analysis, the propagation characteristics and attenuation characteristics of SAW in piezoelectric materials are emphatically analyzed, the piezoelectric substrates materials of SAW devices are optimized, the structure design of interdigital electrodes is improved, and the sensitivity of biosensors is further improved.
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