Abstract

The structural, morphological and electrical properties of spray deposited antimony (Sb) doped tin oxide (SnO2) thin films, prepared from SnCl2.2H2O precursor, have been studied as a function of antimony doping concentration. The doping concentration was varied from 0 to 9 wt% of Sb. The analysis of X-ray diffraction patterns revealed that the as deposited doped and undoped tin oxide thin films are polycrystalline tetragonal structure. AFM images shows that the pyramid type rods shape and grains formation type for pure SnO2 film is converted in small grain with Sb doping concentration. The resistivity results show that the activation energy for pure SnO2 is taken for the temperature range from 80K to 300K and is found to be 0.28eV and 0.4eV corresponding to two different temperature ranges.

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