Abstract
ABSTRACTWe have used cross-section TEM and Nomarski optical microscopy to examine the origin of halo patterns previously observed following picosecond irradiation of ion implantation amorphized Si. The importance of melt depth, quench rate and the incomplete nature of the initial amorphization step are emphasized. A search for a post annealing morphological or microstructural signature related to a plasma activated process proved negative.
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