Structural modification of silica glass by laser scanning

Abstract

The thermophysical nature of rapid CO2 laser heating of silica glass is explored using a numerical simulation that considers the structural state of the glass, as characterized by the fictive temperature. The fictive temperature reflects the thermodynamic temperature at which the glass structure would be in equilibrium. To demonstrate that the thermophysical model can accurately predict the structural change in the glass, the fictive temperature is measured experimentally utilizing the fact that the fictive temperature change corresponds to a change of glass properties that can be revealed through wet chemical etching. The relationship between the etch rate and the fictive temperature is determined by preparing and etching samples of known fictive temperature. Wet chemical etching is used to measure the fictive temperature over the entire laser affected zone and the results are found to compare favorably with the results of the thermophysical model. The model and experimental measurements demonstrate that rapid laser processing results in an increased fictive temperature near the surface of the glass. The fictive temperature increase is about 1000 K and is uniform to within 5% over the laser affected zone. Near the boundary of this zone, the fictive temperature transitions abruptly to the value of the surrounding untreated glass.