Abstract
Yttrium oxide (Y2O3) coatings have been prepared by axial suspension plasma spraying with fine powders. It is clarified that the coatings have high hardness, low porosity, high erosion resistance against CF4 -containing plasma and retention of smooth eroded surface. This suggests that the axial suspension plasma spraying of Y2O3 is applicable to fabricating equipment for electronic devices, such as dry etching. Surface morphologies of the slurry coatings with splats are similar to conventional plasma-sprayed Y2O3 coatings, identified from microstructural analysis. Dense coating structures with no lamellar boundaries have been seen, which is apparently different from the conventional coatings. It has also been found that crystal structure of the suspension coatings mainly composed of metastable monoclinic phase, whereas the powders and the conventional plasma spray coatings have stable cubic phase. Mechanism of coating formation by plasma spraying with fine powder slurries is discussed based on the results.
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