Abstract

Zinc antimonides have been widely studied owing to their outstanding thermoelectric properties. Unlike in the bulk state, where various structurally unknown phases have been identified through their specific physical properties, a number of intermediate phases in the thin-film state remain largely unexplored. Here, in situ X-ray diffraction and X-ray total scattering are combined with in situ measurement of electrical resistivity to monitor the crystallization process of as-deposited amorphous Zn-Sb films during post-deposition annealing. The as-deposited Zn-Sb films undergo a structural evolution from an amorphous phase to an intermediate crystalline phase and finally the ZnSb phase during heat treatment up to 573 K. An intermediate phase (phase B) is identified to be a modified β-Zn8Sb7 phase by refinement of the X-ray diffraction data. Within a certain range of Sb content (∼42-55 at%) in the films, phase B is accompanied by an emerging Sb impurity phase. Lower Sb content leads to smaller amounts of Sb impurity and the formation of phase B at lower temperatures, and phase B is stable at room temperature if the annealing temperature is controlled. Pair distribution function analysis of the amorphous phase shows local ordered units of distorted ZnSb4 tetrahedra, and annealing leads to long-range ordering of these units to form the intermediate phase. A higher formation energy is required when the intermediate phase evolves into the ZnSb phase with a significantly more regular arrangement of ZnSb4 tetrahedra.

Highlights

  • Previous structural studies of thin films have mostly focused on the final thermodynamically stable phases in the crystallized films after annealing

  • In this article we investigate the structural phase evolution during thermal annealing for as-deposited Agdoped and undoped zinc antimonide films, since Ag doping has been demonstrated as an effective way to improve the TE performance as well as the thermal stability (Xiong et al, 2013; Song et al, 2017, 2018, 2019)

  • In situ X-ray diffraction (XRD) patterns were collected as a function of temperature, from RT to 673 K in air

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Summary

Introduction

Previous structural studies of thin films have mostly focused on the final thermodynamically stable phases in the crystallized films after annealing. The PDF technique was initially introduced to study thin films in normal incidence (NI) providing straightforward data modeling (Jensen et al, 2015). We introduce in situ thinfilm PDF data collection and demonstrate the possibility of obtaining quantitative data suitable for structural refinements. Measurement of resistivity in situ is a powerful tool to observe intermediate phases. This technique has been applied to reveal phase changes in Cr2AlC thin films without the measurement of PDF data (Stelzer et al, 2019). We demonstrate simultaneous in situ measurement of electrical resistivity and NI-PDF to observe the structural changes in Zn-Sb thin films

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