Abstract
Thin films of carbon mixed LiFePO 4 were prepared by ionized magnetron sputter deposition (IMSD) and post anneal. The IMSD technique uses a built-in radio frequency coil to generate an inductively coupled plasma (ICP) confined close to the substrate. Therefore, the films were deposited under concurrent ion bombardment, which resulted in an atomic-peening effect during film growth. The evolution of film structures and surface morphologies under different ICP plasma conditions was investigated. The deposited LiFePO 4/C thin films were tested as cathodes for lithium ion batteries. The performances of these thin film cathodes can be related to the modified film structures and surface morphologies. All the films showed a typical discharge voltage of LiFePO 4 at 3.5–3.4 V, except for the 600 °C annealed films. The thin film cathodes deposited under suitable ICP plasma powers exhibited higher specific capacity.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
