Abstract
The structure, electrical and optical properties of nano-crystalline diamond (NCD) films deposited by hot-filament chemical vapor deposition (HFCVD) method, are reported. The influence of the carbon concentration during the film deposition on the Raman scattering, optical gap, optical constants (<i>n</i> and <i>k</i>) and dark-current is investigated. Under a higher carbon concentration during deposition, the NCD film obtained with a smaller grain size, has a lower optical gap, refractive index and electrical resistivity. These changes with the carbon concentration are attributed to the high amount of sp<sup>2</sup> bonded carbons and other non-diamond phase, which is confirmed by Raman scattering measurements.
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