Abstract
Ferroelectric thin films of PZT, with a Zr/Ti molar ratio of 53/47, were prepared by a method that uses oxides as precursors, and deposited on Pt/Si. Films of thickness were obtained. Tetragonal and rhombohedral phases were identified as being present in these films. The dielectric constant and dissipation factor at a frequency of 100 kHz were 514 and 0.057, respectively. Capacitance-voltage characteristics were also measured. The ferroelectricity was confirmed by polarization-field hysteresis loops, with remanent polarization and coercive-field values of and , respectively.
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