Abstract
High-resolution X-ray diffraction, Hall effect and secondary ion mass spectrometry measurements (SIMS) were used to study the effect of carbon doping on the lattice constant of GaSb. A linear increase in tensile strain as a function of carbon concentration was observed in the range from 1×10 19 to 1×10 20 cm −3. The observed strains are consistent with carbon incorporating as a simple substitutional acceptor up to at least 1×10 20 cm −3. SIMS measurements show that the total carbon concentration is linearly proportional to the CCl 4 source flows, whereas the hydrogen concentration increases super-linearly. Nevertheless, the ratio of hydrogen to carbon is no greater than 9% of the maximum incorporated carbon concentration.
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