Abstract
In order to detect the tool-substrate contact force and the tool-target interaction force during nano-manipulation process, a novel MEMS based 2D piezoresistive micro-force sensor structure was proposed. This structure can realize the 3D hardware decoupling for the X，Y and Z axis. Thus, the force detection in the vertical direction (Z axis) and parallel direction reference to base (X axis) can be done simultaneously. Theoretical analysis shows that this structure has a good structural sensitivity. The rationality and feasibility of the structure were confirmed by simulation results.
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