Abstract

The objective of this article is to simulate a piezoelectric cantilever beam generator with power harvesting from ambient vibration energy. This power device will act as the electrical energy supply of a micro-system, which can be used in inaccessible situations, to eliminate dependence on batteries. Optimization of the micro-silicon-based piezoelectric cantilever parameters was achieved by determining the most advantageous dimensions for the piezoelectric generator, while varying the beam length, width, thickness, proof mass weight and so on. The program also made sure that the piezoelectric cantilever beam structure’s natural frequency is equal to the desired input frequency from the ambient exciting vibration. In addition, a prototype miniature generator was fabricated with bulk silicon combined with etching.

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