Abstract
This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one displacement is introduced under the action of acceleration, which reduces the influence of processing errors on the performance of the accelerometer. The two resonators form a differential structure that can diminish the impact of common-mode errors. This accelerometer realizes the separation of the introduction of electrostatic stiffness and the detection of resonant frequency, which is conducive to the decoupling of accelerometer signals. An improved differential evolution algorithm was developed to optimize the scale factor of the accelerometer. Through the final elimination principle, excellent individuals are preserved, and the most suitable parameters are allocated to the surviving individuals to stimulate the offspring to find the globally optimal ability. The algorithm not only maintains the global optimality but also reduces the computational complexity of the algorithm and deterministically realizes the optimization of the accelerometer scale factor. The electrostatic stiffness resonant micro-accelerometer was fabricated by deep dry silicon-on-glass (DDSOG) technology. The unloaded resonant frequency of the accelerometer resonant beam was between 24 and 26 kHz, and the scale factor of the packaged accelerometer was between 54 and 59 Hz/g. The average error between the optimization result and the actual scale factor was 7.03%. The experimental results verified the rationality of the structural design.
Highlights
Introduction published maps and institutional affilAs a kind of micro-electro-mechanical system (MEMS) accelerometer, a silicon resonant micro-accelerometer has the advantages of a direct digital signal output, high sensitivity, high resolution, wide dynamic range, strong anti-interference ability, and good stability [1,2,3,4,5]
Where w2 and L2 are the maximum values in the length and width directions of the proof mass, At is the area of the hollowed-out part of the proof mass, and A p is the area of the parallel plate structure inside the proof mass, L1 is the length of the support beam, and w1 is the width of the support beam
This paper designed a resonant micro-accelerometer based on electrostatic stiffness
Summary
Each resonator provides two sets of driving combs and detecting adopts a one-piece proof mass structure. Since the accelerometer mass one-piece opposite direction, the proof mass is proof in a static initialadopts position,athe electrostaticstructure, stiffnesses when acceleration, theresonators proof mass is subjected to frequencies two electrostatic forcesare of equal introduced by two are equal. The resonant frequencies of tw parallel plate capacitors between the mass and a resonator increase, and the electrostatic are equal and thewhich output of the is zero. At the When same time, gap of to acceleration, the proof mass is displaced under the action of inertial force the parallel plate capacitors between the proof mass and the other resonator reduces, and the electrostatic stiffness increases, which reduces the resonant frequency. The resonant frequency difference of two resonators is used as the output of the accelerometer, which is approximately linear with the input acceleration
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