Abstract
Glow discharge deposited hydrogenated amorphous silicon carbon alloy films with varying carbon content are studied for structural defects by positron lifetime spectroscopy. Measurements of optical properties like refractive index (n) and band gap (Eg) which indirectly reflect the varying carbon content in the films have also been made. The increased defect density in these films with increasing carbon content is very clearly indicated by the positron lifetime data. The nature of these defects and their relative concentrations are determined from the positron lifetime and intensity values. Interestingly a continuous transformation from one type of defect to the other with increasing carbon is indicated by these results.
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