Structural Colors Enabled by Lattice Resonance on Silicon Nitride Metasurfaces

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Artificial color pixels based on dielectric Mie resonators are appealing for scientific research as well as practical design. Vivid colors are imperative for displays and imaging. Dielectric metasurface-based artificial pixels are promising candidates for developing flat, flexible, and/or wearable displays. Considering the application feasibility of artificial color pixels, wide color gamuts are crucial for contemporary display technology. To achieve a wide color gamut, ensuring the purity and efficiency of nanostructure resonance peaks in the visible spectrum is necessary for structural color design. Low-loss dielectric materials are suitable for achieving vivid colors with structural color pixels. However, high-order Mie resonances prevent color pixels based on dielectric metasurfaces from efficiently generating highly saturated colors. In particular, fundamental Mie resonances (electric/magnetic dipole) for red can result in not only a strong resonance peak at 650 nm, but also high-order Mie resonances at shorter wavelengths, which reduces the saturation of the target color. To address these problems, we fabricated silicon nitride metasurfaces on quartz substrates and applied Rayleigh anomalies at relatively short wavelengths to successfully suppress high-order Mie resonances, thus creating vivid color pixels. We performed numerical design, semianalytic considerations, and experimental proof-of-concept examinations to demonstrate the performance of the silicon nitride metasurfaces. Apart from traditional metasurface designs that involve transmission and reflection modes, we determined that lateral light incidence on silicon nitride metasurfaces can provide vivid colors through long-range dipole interactions; this can thus extend the applications of such surfaces to eyewear displays and guided-wave illumination techniques.