Abstract
Structural properties of electroluminescent ZnS: Mn thin films grown by atomic layer epitaxy, which emit yellow light with an external efficiency as high as 2%, are investigated. The films grown at 500°C have a strong preferred orientation: one-half of the 00·1 plane normals are aligned within 7° from the normal of the glass substrate. The length of coherently diffracting domains (crystallite size) in the direction of the normal obtained from the Fourier analysis of a line profile ranges from 30 to 160 nm. The average relative strain in the same direction is calculated to be 10 −3. The estimated dislocation density is about 10 10 cm −2.
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