Structural characterization of superconducting Y-Ba-Cu-O thin films, prepared by pulsed electron beam evaporation

Abstract

The surface morphology and the interface structure of superconducting Y-Ba-Cu-O thin films grown on SrTiO3 substrates by pulsed electron beam evaporation have been studied using scanning electron microscopy, transmission electron microscopy and atomic force microscopy. The crystal structure and epitaxial orientation of the films have been analysed using X-ray diffraction. Parametric studies of the effect on the structural development of Y-Ba-Cu-O films of: (i) evaporation rate, (ii) deposition frequency, (iii) substrate temperature and (iv) target properties have been performed. Information has been deduced about the growth process in three aspects: (i) epitaxial growth, (ii) surface roughness and (iii) phase stability.