Abstract
Epitaxial YBa 2Cu 3O x superconducting films have been grown in-situ by XeCl excimer laser ablation of a sintered pellet. The films, 1000–1500 Å thick, were deposited on monocrystalline SrTiO 3, LaAlO 3, MgO and YSZ substrates. X-ray diffraction and RBS-channeling techniques were used for the structural analysis of the substrates and of the films.
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