Abstract
High quality c-axis oriented epitaxial Bi 2Sr 2CuO 6+δ thin films were deposited on 0° and 6° vicinal SrTiO 3 (100) substrates using an inverted cylindrical magnetron sputtering method. Their structural properties, regarding the orientation, epitaxy, surface morphology, composition, and surface microstructure, were studied by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. The influences of the deposition parameters and substrate surface structure on the structural properties of these epitaxial Bi 2Sr 2CuO 6+δ thin films are studied. A metal-insulator transition is observed with a variation of the Sr deficiency. It is demonstrated that films on 0° and 6° vicinal substrates grow in the two-dimensional and step-flow modes, respectively. Optimal deposition conditions were obtained leading to an extremely smooth film surface and high epitaxial quality.
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